Which version of .NET are you using? If it's .NET 3.5, I'd just call ToArray() and be done with it.

If you only have a non-generic IEnumerable, do something like this:

IEnumerable query = ...;
MyEntityType[] array = query.Cast<MyEntityType>().ToArray();

If you don't know the type within that method but the method's callers do know it, make the method generic and try this:

public static void T[] PerformQuery<T>()
{
    IEnumerable query = ...;
    T[] array = query.Cast<T>().ToArray();
    return array;
}